Just when it appeared that vacuum electronics might be left behind in the wake of solid-state technologies, a talented team of engineers and researchers at Innosys, Inc. (Salt Lake City, UT) have applied the microfabrication techniques commonly used for solid-state devices to the creation of next-generation vacuum tubes and power modules. The company, started several years ago by professors from the University of Utah, features proprietary Solid State Vacuum Device (SSVD) technology based on unique process techniques that combine a mature microelectronic integrated circuit (IC) fabrication process with modern microelectromechanical-systems (MEMS) technology. The company also boasts an active-device technology capable of producing high-voltage, high-power, high-frequency devices that can be combined with vacuum electronics to form high-power modules at both microwave and millimeter-wave frequencies. The company has developed high-power traveling-wave-tube (TWT) amplifiers (TWTAs) for Ka-band (approximately 30 GHz) frequencies employing microfabrication techniques. The firm plans to combine its expertise in high-frequency solid-state devices to create a millimeter-wave power amplifier module consisting of a solid-state preamplifier and TWTA, but at a fraction of the size of existing power amplifier modules. For more information, please visit the web site.

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