RF microelectromechanical-systems (MEMS) technology has been in use for about two decades, although from a market perspective, the disappointments seem to outweigh the successes. Full deployment of the technology is yet to come, however, and 5G mobile communications standards may be fertile ground to exploit the full potential of MEMS technology.
For more than 20 years, research articles have touted the capabilities of RF-MEMS passive components, such as micro relays and variable capacitors (varactors). These components have been lauded for their low loss, high isolation, and wideband performance. In addition, their use in higher-level assemblies, such as multiple-state impedance tuners and programmable phase shifters, pointed to broad mass-market adoption of MEMS devices and components.